GO TipTilt HV
The GO TipTilt High Vacuum stage moves loads of up to 2,5 kg with nanometer precision along the Z-axis, as well as around the X-axis and the Y-axis in vaccum surrounding.
All products in the modular PRECIBEO GO system are compatible and are easily combined into multi-axis systems offering smooth continuous motion, fast step and settling times, and self-locking at rest.
| Positioning | GO-TIPTILTHV-15N | GO-TIPTILTHV-30N |
|---|---|---|
| Travel (Z) | ±10 mm | |
| Minimum Incremental Motion (Z) | 2 nm | |
| Minimum Incremental Motion Θ(X, Y) | < 0,1 µrad | |
| Repeatability (Z) | ± 200 nm | |
| Repeatability Θ(Z) | ± 15 µrad | |
| Motion | GO-TIPTILTHV-15N | GO-TIPTILTHV-30N |
| Maximum Operating Force (Push/Pull) | (Z) 15 N (min.) | (Z) 30 N (min.) |
| Holding Force (When Power Is Off) | (Z) 18 N (min.) | (Z) 33 N (min.) |
| Maximum Speed At No Load (Z) | 8 mm/s | |
| Maximum Speed With Max Load On Top Plate (Z) | 5 mm/s (min.) | 1 mm/s (min.) |
| Drive Type | GO-TIPTILTHV-15N | GO-TIPTILTHV-30N |
| Base Module | PRECIBEO GO Linear Stage 4545 | |
| Mechanical | GO-TIPTILTHV-15N | GO-TIPTILTHV-30N |
| Maximum Load Centered on Top | 1 kg | 2,5 kg |
| Diameter | 150 mm | |
| Height | 92 mm | |
| Miscellaneous | GO-TIPTILTHV-15N | GO-TIPTILTHV-30N |
| Vacuum Side Cables | 3 pcs of 1 m cable (±5%) with f. D9SUB connector | |
| Air Side Cables | 3 pcs of 2 m cable (±5%) with f. D9SUB & ix Industrial™ connectors | |
| Material | Aluminum | |
Related Products
GO XYR HV
The PRECIBEO GO XYR HV stage moves loads of up to 10 kg with nanometer precision along the X- and Y-axis, as well as around the Z-axis, in down to 10-4 Pa vacuum.