X, Y and rotation around Z
GO XYR
Center and rotate a component in a plane
- Travel
- X/Y ±10 mm · R ±10°
- Load
- 10 kg centered top load
PRECIBEO GO 3-axis stages
3-Axis Piezo Positioning Stages
Precision alignment in three degrees of freedom
Center, rotate and level your components with PRECIBEO GO three-axis nanopositioning stages. Piezo walking drives combine high force with 2 nm linear minimum incremental motion, smooth continuous movement and self-locking at rest.
2 nm
Linear minimum incremental motion
±10 mm
Linear travel
±10°
GO XYR angular travel
2.5 kg
Maximum GO TipTilt lift
10⁻⁴ Pa
High-vacuum versions
Choose the right motion
Three axes, configured for your alignment task
A three-axis positioning stage controls three independent movements. Choose GO XYR for planar alignment, GO TipTilt for vertical positioning and leveling, or a GO XYZ assembly for three-axis translation.
Z alongside X and Y tilt
GO TipTilt
Adjust height and level a surface
- Travel
- Z ±10 mm · tilt ±9°
- Load
- Up to 2.5 kg centered load
GO XYR
Center and rotate a component in a plane.
GO TipTilt
Adjust height and level a surface.
Closed-loop nanopositioning
Fine alignment with useful force
Each piezoelectric stage uses GO piezo walking drives to combine nanometer-scale linear adjustments with millimeter-scale travel. Closed-loop position feedback regulates movement, supporting coarse positioning and fine alignment within one system.
High force density enables GO XYR to position centered top loads up to 10 kg and GO TipTilt to lift up to 2.5 kg. Smooth continuous motion and fast move-and-settle behavior support repeated alignment, while self-locking drives hold position without continuous drive power.
Why choose a PRECIBEO GO three-axis stage?
Nanometer-scale adjustment
GO piezo walking drives provide 2 nm linear minimum incremental motion together with millimeter-scale travel for coarse positioning and fine alignment in one system.
Useful force and vertical lift
GO XYR supports centered top loads up to 10 kg during planar motion, while GO TipTilt lifts up to 2.5 kg depending on the selected drive version.
Closed-loop, continuous motion
Position feedback regulates smooth continuous movement and supports fast move-and-settle behavior for repeated alignment tasks.
Self-locking at rest
The walking-piezo drives hold position without continuous drive power, including vertical payloads on GO TipTilt.
Compare GO XYR and GO TipTilt
| Specification | GO XYR | GO TipTilt |
|---|---|---|
| Linear travel | X/Y: ±10 mm | Z: ±10 mm |
| Angular travel | Around Z: ±10° | Around X/Y: ±9° |
| Linear minimum incremental motion | 2 nm | 2 nm |
| Diameter | 165 mm | 150 mm |
| Maximum centered top load | 10 kg | 1 kg or 2.5 kg, depending on version |
| High-vacuum version | Available | Available |
XYR planar alignment
Center and rotate on one platform
GO XYR combines ±10 mm travel in X and Y with ±10° rotation around Z. Use it when a component must be centered and oriented within the same plane.
Planar motion for centered loads
The 10 kg rating describes a centered top load supported during planar motion. Select the 8 N or 16 N drive version according to the required push/pull force and loaded speed.
Published positioning range
| Specification | GO XYR |
|---|---|
| X travel | ±10 mm |
| Y travel | ±10 mm |
| Rotation around Z | ±10° |
| Linear minimum incremental motion | 2 nm |
| Maximum centered top load | 10 kg |
Motorized tip tilt
Vertical positioning and fine tilt adjustment
GO TipTilt combines ±9° tilt with ±10 mm vertical travel for lifting and leveling samples, optical assemblies and fixtures. Choose the drive version according to payload and loaded speed.
Lift, level and hold
The piezo walking drives combine vertical force with fine adjustment and unpowered holding. Include the fixture and component in the total payload when selecting your system.
Choose 15 N or 30 N
| Performance | 15 N | 30 N |
|---|---|---|
| Centered load lifted | 1 kg | 2.5 kg |
| Z speed at maximum top load | >5 mm/s | >1 mm/s |
| Z holding force with power off | 18 N | 33 N |
Mirror alignment and laser beam steering
A motorized tilt stage beneath a suitable mirror fixture can adjust beam direction as well as mounting height.
When selecting a motorized mirror mount or laser beam steering system, match the angular range, payload and required response time to the optical layout.
Control and integration
Coordinate three drives through one controller
A GO Controller operates all three drives simultaneously with closed-loop point-to-point control. Connect over USB and use GO software and programming interfaces to integrate motion into your instrument.
Choose the three-axis combination you need
GO XYR and GO TipTilt are complete three-axis configurations with different motion combinations. If your application instead requires X, Y and Z translation, three GO linear stages can be mounted together as a separate GO XYZ assembly—it is an alternative configuration, not an add-on to GO XYR or GO TipTilt.
Control it your way
GO TipTilt supports GO Motion and C++ DLLs. The controller platform also offers Precibeo ASCII Rapid commands, GO Command and LabVIEW drivers. Model-specific data sheets and CAD downloads help you plan mounting and cabling.
High vacuum
10⁻⁴ Pa
Vacuum-compatible three-axis stages
GO XYR HV and GO TipTilt HV support operation down to 10⁻⁴ Pa. Build a high-vacuum positioning system for planar alignment or vertical leveling by connecting vacuum-side cables through chamber feedthroughs to air-side cables and the GO Controller.
Applications
Three-axis alignment for science and industry
Optics and photonics
Center optical components, adjust rotation and align mirror fixtures for beam positioning
Semiconductor metrology
Align samples and fixtures for inspection or measurement
Microscopy
Adjust sample height, inclination and in-plane orientation
Research and OEM instruments
Integrate precise three-axis alignment in ambient or high-vacuum environments
Movements
Choose X/Y plus rotation, Z plus two-axis tilt, or XYZ translation.
Travel and range
Match the required linear travel and angular range.
Payload and dynamics
Include the fixture, center of gravity and required speed.
Mechanical integration
Check the mounting space, interfaces and cable routing.
Environment and control
Select standard or high-vacuum stages, controller and software interface.
Your questions
Frequently asked questions
Is every three-axis stage an XYZ stage?
Three axes can describe different combinations of movement. GO XYR provides X/Y translation and Z rotation; GO TipTilt provides Z translation and X/Y tilt. GO XYZ assemblies provide three linear axes.
Should I choose a motorized gimbal mount or a tip tilt stage?
Choose a motorized gimbal mount when the main requirement is angular adjustment around a defined pivot point, especially when the optic should remain centered while it rotates. Choose GO TipTilt when the payload needs height adjustment as well as two-axis leveling: it combines Z translation with tilt around X and Y on one load-bearing platform.
Does 2 nm minimum incremental motion mean 2 nm accuracy?
The 2 nm specification describes the smallest incremental linear movement. Evaluate positioning accuracy and repeatability separately, alongside the payload and operating conditions.
When should I choose a six-axis stage?
Choose a six-axis system when your application requires X, Y and Z translation together with rotation around all three axes. Explore GO six-axis stages for complete position and orientation control.
Let’s find your configuration
Configure your three-axis positioning system
Tell us the required movements, travel, angular range, payload, center of gravity, speed, mounting space and environment. We will help select the stage, drive version, controller and integration components.
Email info@precibeo.com
or call +46 18 700 13 40