GO TipTilt HV

GO TipTilt HV

SKU: GO-TIPTILTHV-15N / GO-TIPTILTHV-30N
Category:

The GO TipTilt High Vacuum stage moves loads of up to 2,5 kg with nanometer precision along the Z-axis, as well as around the X-axis and the Y-axis in vaccum surrounding.

All products in the modular PRECIBEO GO system are compatible and are easily combined into multi-axis systems offering Smooth Continuous Motion, Fast Step & Settling Times and that are Self-Locking at Rest.

Positioning GO-TIPTILTHV-15N GO-TIPTILTHV-30N
Travel (Z) +-10 mm
Minimum Incremental Motion (Z) 2 nm
Minimum Incremental Motion Θ(X, Y) <0,1 µrad
Repeatability (Z) +- 200 nm
Repeatability Θ(Z) +- 15 µrad
Motion GO-TIPTILTHV-15N GO-TIPTILTHV-30N
Maximum Operating Force (Push/Pull) (Z) 15 N (min.) (Z) 30 N (min.)
Holding Force (When Power Is Off) (Z) 18 N (min.) (Z) 33 N (min.)
Maximum Speed At No Load (Z) 8 mm/s
Maximum Speed With Max Load On Top Plate (Z) 5 mm/s (min.) 1 mm/s (min.)
Drive Type GO-TIPTILTHV-15N GO-TIPTILTHV-30N
Base Module PRECIBEO GO Linear Stage 4545
Mechanical GO-TIPTILTHV-15N GO-TIPTILTHV-30N
Maximum Load Centered on Top 1 kg 2,5 kg
Diameter 150 mm
Height 92 mm
Miscellaneous GO-TIPTILTHV-15N GO-TIPTILTHV-30N
Vacuum Side Cables 3 pcs of 1 m cable (+-5%) with f. D9SUB connector
Air Side Cables 3 pcs of 2 m cable (+-5%) with f. D9SUB &ix Industrial™ connectors
Material Aluminum

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